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Tom’s Hardware
Tom’s Hardware
Technology
Luke James

China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT

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A state-backed company in Shanghai has begun mass-producing immersion deep ultraviolet lithography machines and is due to deliver the first units this year to SMIC, Hua Hong Semiconductor, and memory maker ChangXin Memory Technologies, according to The Information, citing two people familiar with the program. Output targets around five machines in 2026 and roughly 20 in 2027, and all three named recipients sit on the list of Chinese firms that a bill now moving through Congress would cut off from ASML sales and servicing by statute.

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