Prinano Technology, a China-based developer of nanoimprint tools, has delivered its first semiconductor-grade step-and-repeat nanoimprint lithography system to a Chinese customer that is focused on specialty process technologies. Instead of using traditional light-based lithography techniques, this type of chipmaking tool 'stamps' a chip design onto the wafer with a quartz mold that's imprinted with the circuit design.
Prinano's PL-SR-series machine is the first nanoimprint lithography tool (NIL) developed in China and set to be used for actual chip production once it passes all necessary tests at Prinano's client. Prinano is the second company in the world to deliver an actual nanoimprint lithography tool to a customer after Canon.
