ASML and Imec this week established a five-year partnership designed to enable Imec's researchers and developers access to ASML's latest tools. The move is focused on sub-2nm process technologies that will require ASML's latest lithography (including High-NA), metrology, and inspection tools. Imec will ensure that engineers from academia and various companies have the latest equipment for their research, whereas ASML will ensure that its tools are incorporated into leading-edge process technologies.
Under the partnership, Imec will gain access to ASML's comprehensive range of advanced wafer fabricating equipment (WFE), including range-topping Twinscan NXT (DUV), Twinscan NXE (Low-NA EUV tools with a 0.33 numerical aperture optics), and Twinscan EXE (High-NA EUV tools with a 0.55 numerical aperture optics) lithography systems. Additionally, imec will incorporate ASML's YieldStar optical metrology solutions and HMI’s single- and multi-beam inspection tools into its facilities.
