
Canon recently introduced its nanoimprint lithography (NIL) tool that can be used to make chips on a 5nm-class process technology, and compete against ASML's extreme ultraviolet (EUV) lithography tools. Apparently, Canon is looking to price its tool at a fraction of that of ASML's EUV litho machines, which could democratize access to advanced chip production for smaller chipmakers without vast resources, according to Bloomberg.
"The price will have one digit less than ASML's EUV [litho tool]," said Fujio Mitarai, chief executive of Canon, in an interview with Bloomberg. " I do not expect nanoimprint technology to overtake EUVs, but I’m confident this will create new opportunities and demand. We are already fielding many inquiries from customers."