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Tom’s Hardware
Tom’s Hardware
Technology
Anton Shilov

ASML ships its second High-NA EUV litho tool to unspecified client

ASML.

ASML on Wednesday said that it had begun to ship its second High-NA EUV lithography system to another customer. The announcement highlights that there is a major interest for next-generation extreme ultraviolet (EUV) lithography among leading chipmakers. Meanwhile, it is not clear which of ASML's customers is the second company to get an EUV tool with a 0.55 numerical aperture projection optics. 

"Regarding High-NA, or 0.55 NA EUV, we shipped our first system to a customer and this system is currently under installation," said Christophe Fouquet, chief business officer of ASML, at the company's earnings conference call with analysts and investors. "We started to ship the second system this month and its installation is also about to start."

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