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AnandTech
AnandTech
Technology
Anton Shilov

Applied Materials' New Deposition Tool Enables Copper Wires to Be Used for 2nm and Beyond

Although the pace of Moore's Law has undeniably slackened in the last decade, transistor density is still increasing with every new process technology. But there is a challenge with feeding power to smaller transistors, as with the smaller transistors comes thinner power wires within the chip, which increases their resistance and may cause yield loss. Looking to combat that effect, this week Applied Materials introduced its new Applied Endura Copper Barrier Seed IMS with Volta Ruthenium Copper Vapor Deposition (CVD) tool, which enables chipmakers to keep using copper for wiring with 2 nm-class and more advanced process technologies.

Today's advanced logic processors have about 20 layers of metal, with thin signal wires and thicker power wires. Scaling down wiring with shrinking transistors presents numerous challenges. Thinner wires have higher electrical resistance, while closer wires heighten capacitance and electrical crosstalk. The combination of the two can lead to increased power consumption while also limiting performance scaling, which is particularly problematic for datacenter grade processors that are looking to have it all. Moving power rails to a wafer's back-side is expected to enhance performance and efficiency by reducing wiring complexity and freeing up space for more transistors. 

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